| Автор | M. A. Childs |
| Автор | K. L. Menningen |
| Автор | H. Toyoda |
| Автор | L. W. Anderson |
| Автор | J. E. Lawler |
| Дата выпуска | 1994-03-20 |
| dc.description | A highly sensitive multielement optical-absorption method is used to measure the absolute column densities of both CH<sub>3</sub> and CH in a d.c. plasma-assisted diamond chemical-vapor-deposition (CVD) system with an input gas of CH<sub>4</sub> diluted in H<sub>2</sub>. The CH<sub>3</sub> column density decreases slowly with distance from the cathode and increases with increasing CH<sub>4</sub> input fraction. The CH density is sharply peaked near the cathode. The CH<sub>3</sub> and CH densities are compared with measurements of the same radicals made in a hot-filament diamond CVD system. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Measurement of CH<sub>3</sub> and CH Densities in a Diamond Growth d.c. Discharge |
| Тип | lett |
| DOI | 10.1209/0295-5075/25/9/016 |
| Electronic ISSN | 1286-4854 |
| Print ISSN | 0295-5075 |
| Журнал | EPL (Europhysics Letters) |
| Том | 25 |
| Первая страница | 729 |
| Последняя страница | 734 |
| Выпуск | 9 |
