0.5 MeV Submicron Ion Probe System for RBS/PIXE.
Inoue K.; Takai M.; IshibashI K.; Kawata Y.; Suzuki N.; Namba S.
Журнал:
MRS Proceedings
Дата:
1988--01
Аннотация:
A nuclear microprobe-forming system for the microscopic RBS/PIXE measurement of micro devices has been developed and installed at the Research Center for Extreme Materials, Osaka University. The use of precision quadrupole magnets and an objective collimator ensures a final spot size of less than 1μm.
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