Titanium imido complexes as precursors to titanium nitride
Carmalt, Claire J.; Newport, Anne C.; Parkin, Ivan P.; White, Andrew J. P.; Williams, David J.; Carmalt Claire J.; Department of Chemistry, Christopher Ingold Laboratories, University College London; Newport Anne C.; Department of Chemistry, Christopher Ingold Laboratories, University College London; Parkin Ivan P.; Department of Chemistry, Christopher Ingold Laboratories, University College London; White Andrew J. P.; Department of Chemistry, Imperial College of Science, Technology and Medicine; Williams David J.; Department of Chemistry, Imperial College of Science, Technology and Medicine
Журнал:
Journal of the Chemical Society, Dalton Transactions
Дата:
2002
Аннотация:
Treatment of TiCl4 with 2â 4 fold excess of Bu<sup>t</sup>N(H)SiMe3 in CH2Cl2 resulted in the formation of orange crystals of [TiCl2(NBu<sup>t</sup>)(NH2Bu<sup>t</sup>)]4, the X-ray crystal structure of which has been determined. In the presence of excess pyridine, the reaction of TiCl4 with 1 equivalent of Bu<sup>t</sup>N(H)SiMe3 resulted in the isolation of the monomeric complex [TiCl2(NBu<sup>t</sup>)(py)3]. Low pressure chemical vapour deposition of [TiCl2(NBu<sup>t</sup>)(py)3] forms thin films of titanium nitride (a = 4.23(1) â «, XPS TiN0.75) at 600 °C.
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