The Institute of Physics ( IOP ) по журналам "Plasma Sources Science and Technology"
Отображаемые элементы 1-20 из 598
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(1992-03-01)Microwave plasmas (f= omega /2 pi =2.45 GHz, 200-1000 W) were excited and maintained at low static magnetic fields, B=300-450 G and gas pressures of 0.2-10 mTorr. Two modes were found and studied: low plasma density mode ...
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(1995-08-01)A biased optical probe (BOP) method, i.e. novel technique for measurements of the electron energy distribution function (EEDF) in a range of such high energies as 10-50 eV has been developed. This method is based on the ...
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(1994-05-01)We have measured the absolute fluorine atom concentrations in electron cyclotron resonance (ECR) and reactive ion etching (RIE) plasmas by optimizing the actinometry technique. The major difference between this work and ...
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(1993-11-01)Low-inductance vacuum spark discharges display the occurence of hot tiny micropinches, which consist of anode material and which are intense emitters of X-ray radiation. This report presents absolute measurements of the ...
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(1998-08-01)Broad-band UV absorption spectroscopy was used to determine radical densities in reactive gas plasmas generated in a 13.56 MHz capacitively coupled parallel plate reactor. Five radical species were detected: , CF, AlF, ...
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(1995-02-01)Using the method of reabsorption the absolute densities of argon, atomic and molecular carbon are determined during the deposition of amorphous hydrogenated (diamond-like) carbon coatings by an expanding thermal are plasma. ...
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(1999-08-01)A pseudo-Planck radiator at the wavelengths 700.2 Å, 713.8 Å, 770.4 Å and 780.3 Å based on a long capillary discharge was realized and investigated. Conditions were found for which the emission of the resonance lines of ...
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(1997-08-01)Theoretical approaches to the accurate dynamical calculation of cross sections and rate coefficients of neutral atom - diatom reactions are illustrated. Computational steps needing to be accomplished in order to tackle the ...
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(1993-11-01)A model of the ion confinement and losses in the open magnetic trap of an electron cyclotron resonance ion source (ECRIS) is proposed in this article. This model is based on the processes connected with the elastic and ...
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(1994-11-01)Ion-beam-sputtered and -assisted deposition technologies need medium energy, 100-2000 eV, ion beams of current density 1-3 mA cm-2, operated in a reactive and corrosive gas environment. We designed, built and characterized ...
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(1998-08-01)We compare to the probe method a spectroscopic method for determining in plasmas the electron distribution function (EDF) over a wide energy range. For a test of the radiative-collisional model we use to describe the plasma ...
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(1997-02-01)This paper deals with Langmuir probe measurements in a planar magnetron sputtering system in which the plasma confinement near a target can be improved by means of an assembly of permanent magnets placed above the target. ...
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(1993-02-01)The influence of driving frequency on discharge structure and production efficiency has been investigated in Ar over the frequency range from 13.56 MHz to 100 MHz in terms of the relaxation continuum model. Under constant ...
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(1997-08-01)In this paper, the plasma ignition process above a metallic surface submitted to UV laser irradiation is studied. An easy model based on the hypothesis of thermal equilibrium between ejected vapour and heated surface, and ...
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(1994-08-01)Particle growth and subsequent extinction in plasma reactors for surface processing has been investigated in a parallel-plate radiofrequency discharge at 13.56 MHz in Ar with (-CF2CF2-)n and its fragments as an impurity. ...
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(1998-08-01)In this paper, a 1D numerical, time-dynamic, fluid model (SHEATHSIM) has been developed to study the effect of RF chuck bias on high density electronegative discharges especially under conditions of sheath inversion and ...
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(1992-08-01)The aim of this study is to characterize the SiO2 etching process developed in a magnetic triode experimental system fed by C2F6. The effect of some experimental parameter variation, namely of pressure, C2F6 flow, magnetic ...
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(1996-11-01)High-intensity discharge (HID) lamp starting includes three phases: electrical breakdown, cold-cathode glow discharge and thermionic arc (hot-cathode glow discharge). Recent enhancements in the understanding of these phases ...
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(1996-11-01)A modulated duoPIGatron plasma source, operating with a co-axial cathode, has been developed for the diagnostic neutral beam injector of the Tokamak de Varennes. The source plasma modulation is obtained by an arc-curren ...
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(1996-08-01)The modelling of a cylindrical low-pressure RF discharge in a strong axial magnetic field is analysed by a comparison of previously obtained kinetic particle-in-cell - Monte Carlo (PIC - MC) simulation results to a newly ...
Отображаемые элементы 1-20 из 598