Measurement of CH<sub>3</sub> and CH Densities in a Diamond Growth d.c. Discharge
M. A. Childs; K. L. Menningen; H. Toyoda; L. W. Anderson; J. E. Lawler
Журнал:
EPL (Europhysics Letters)
Дата:
1994-03-20
Аннотация:
A highly sensitive multielement optical-absorption method is used to measure the absolute column densities of both CH<sub>3</sub> and CH in a d.c. plasma-assisted diamond chemical-vapor-deposition (CVD) system with an input gas of CH<sub>4</sub> diluted in H<sub>2</sub>. The CH<sub>3</sub> column density decreases slowly with distance from the cathode and increases with increasing CH<sub>4</sub> input fraction. The CH density is sharply peaked near the cathode. The CH<sub>3</sub> and CH densities are compared with measurements of the same radicals made in a hot-filament diamond CVD system.
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