| Автор | Nadège Frantz-Rodriguez |
| Автор | Alain Bosseboeuf |
| Автор | Elisabeth Dufour-Gergam |
| Автор | Valérie Stambouli-Séné |
| Автор | Gérard Nouet |
| Автор | Wilfrid Seiler |
| Автор | Jean-Lou Lebrun |
| Дата выпуска | 2000-06-01 |
| dc.description | Preliminary results on NiTiCu shape memory alloy thin-film deposition on silicon are reported. Characteristics of these films (composition, density and electrical resistivity) were correlated with working gas pressure and rf power during sputtering. The films were then annealed in order to crystallize them. The properties of these films were examined as functions of annealing and measurement temperatures in order to evidence shape memory behaviour. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Composition and structure of NiTiCu shape memory thin films |
| Тип | paper |
| DOI | 10.1088/0960-1317/10/2/308 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 10 |
| Первая страница | 147 |
| Последняя страница | 151 |
| Выпуск | 2 |
