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Автор Xu Ming
Автор Yang Tao
Автор Yu Wen-xue
Автор Yang Ning
Автор Liu Cui-xiu
Автор Mai Zhen-hong
Автор Lai Wu-yan
Автор Tao Kun
Дата выпуска 2000-11-01
dc.description A modified Bragg law for straightforward determining the film thickness by low-angle X-ray reflection was derived based on the geometrical optical theory. We showed that this modified Bragg law and its inference formulae could be used to accurately determine the thickness of the monolayer or multilayer film. Furthermore, the modified Bragg law for determining the superlattice period presented earlier by others can be derived from the above modified Bragg law. The similar inference formulae were also given. The precision in determining the film thickness and/or superlattice period by the above formulae was discussed.
Формат application.pdf
Издатель Institute of Physics Publishing
Название Accurate determination of film thickness by low-angle X-ray reflectionProject supported by the the Foundation for Key Research Programs of the China 9th 5-year Plan, from Chinese Academy of Sciences (Grant No. KJ951-AL-401) and the National Natural Science Foundation of China (Grant No. 19890310).
Тип paper
DOI 10.1088/1009-1963/9/11/007
Electronic ISSN 1741-4199
Print ISSN 1009-1963
Журнал Chinese Physics
Том 9
Первая страница 833
Последняя страница 836
Выпуск 11

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