Автор |
Xu Ming |
Автор |
Yang Tao |
Автор |
Yu Wen-xue |
Автор |
Yang Ning |
Автор |
Liu Cui-xiu |
Автор |
Mai Zhen-hong |
Автор |
Lai Wu-yan |
Автор |
Tao Kun |
Дата выпуска |
2000-11-01 |
dc.description |
A modified Bragg law for straightforward determining the film thickness by low-angle X-ray reflection was derived based on the geometrical optical theory. We showed that this modified Bragg law and its inference formulae could be used to accurately determine the thickness of the monolayer or multilayer film. Furthermore, the modified Bragg law for determining the superlattice period presented earlier by others can be derived from the above modified Bragg law. The similar inference formulae were also given. The precision in determining the film thickness and/or superlattice period by the above formulae was discussed. |
Формат |
application.pdf |
Издатель |
Institute of Physics Publishing |
Название |
Accurate determination of film thickness by low-angle X-ray reflectionProject supported by the the Foundation for Key Research Programs of the China 9th 5-year Plan, from Chinese Academy of Sciences (Grant No. KJ951-AL-401) and the National Natural Science Foundation of China (Grant No. 19890310). |
Тип |
paper |
DOI |
10.1088/1009-1963/9/11/007 |
Electronic ISSN |
1741-4199 |
Print ISSN |
1009-1963 |
Журнал |
Chinese Physics |
Том |
9 |
Первая страница |
833 |
Последняя страница |
836 |
Выпуск |
11 |