Автор |
K B Sundaram |
Автор |
G K Bhagavat |
Дата выпуска |
1983-01-14 |
dc.description |
Transparent conducting tin oxide films were prepared by a chemical vapour deposition technique. The films were deposited at substrate temperatures of 400, 450 and 500 degrees C. The films were annealed (above the deposition temperatures) up to 1000 degrees C in various gas atmospheres (argon, oxygen, nitrogen and air). It is observed that there is an initial decrease in resistivity up to a temperature of 700 degrees C which is followed by an increase in resistivity beyond 700 degrees C. X-ray and electron diffraction studies have been carried out on the annealed films and the behaviour of this decrease and increase in resistivity has been explained. |
Формат |
application.pdf |
Издатель |
Institute of Physics Publishing |
Название |
High-temperature annealing effects on tin oxide films |
Тип |
paper |
DOI |
10.1088/0022-3727/16/1/011 |
Electronic ISSN |
1361-6463 |
Print ISSN |
0022-3727 |
Журнал |
Journal of Physics D: Applied Physics |
Том |
16 |
Первая страница |
69 |
Последняя страница |
76 |
Аффилиация |
K B Sundaram; Dept. of Electrical Engng., Indian Inst. of Technol., Bombay, India |
Аффилиация |
G K Bhagavat; Dept. of Electrical Engng., Indian Inst. of Technol., Bombay, India |
Выпуск |
1 |