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Автор K B Sundaram
Автор G K Bhagavat
Дата выпуска 1983-01-14
dc.description Transparent conducting tin oxide films were prepared by a chemical vapour deposition technique. The films were deposited at substrate temperatures of 400, 450 and 500 degrees C. The films were annealed (above the deposition temperatures) up to 1000 degrees C in various gas atmospheres (argon, oxygen, nitrogen and air). It is observed that there is an initial decrease in resistivity up to a temperature of 700 degrees C which is followed by an increase in resistivity beyond 700 degrees C. X-ray and electron diffraction studies have been carried out on the annealed films and the behaviour of this decrease and increase in resistivity has been explained.
Формат application.pdf
Издатель Institute of Physics Publishing
Название High-temperature annealing effects on tin oxide films
Тип paper
DOI 10.1088/0022-3727/16/1/011
Electronic ISSN 1361-6463
Print ISSN 0022-3727
Журнал Journal of Physics D: Applied Physics
Том 16
Первая страница 69
Последняя страница 76
Аффилиация K B Sundaram; Dept. of Electrical Engng., Indian Inst. of Technol., Bombay, India
Аффилиация G K Bhagavat; Dept. of Electrical Engng., Indian Inst. of Technol., Bombay, India
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