| Автор | I Lin |
| Автор | R L Sandstrom |
| Автор | F Pasierb |
| Автор | D C Hinson |
| Дата выпуска | 1988-06-14 |
| dc.description | The energy flux onto an RF magnetron electrode surface was measured by a nonperturbative calorimetric method in Ar, CF<sub>4</sub>, C<sub>2</sub>F<sub>6</sub>, CHF<sub>3</sub> and C<sub>3</sub>F<sub>8</sub> discharges. It was found that about 40% to 80% of the input RF power was dissipated on the magnetron electrode surface. The energy flux is 15% to 50% higher in argon than that in the fluorocarbons. When the sheath voltage is greater than 100 V, energy flux is mainly contribute by ion kinetic energy, and Q varies as n<sub>i</sub> mod V<sub>DC</sub> mod varies as (RF power)<sup>1.2</sup>, where n<sub>i</sub> is the ion density and V<sub>DC</sub> is the DC potential of the capacitively coupled magnetron electrode. For the sheath voltage less than 100 V, radiation, electron-ion wall recombination, and neutral relaxation processes have to be considered. It is also found that the anomalous diffusion, presumably due to drift-type turbulence, affects the cross-field energy flux to the electrode surface. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Energy flux onto an RF magnetron surface |
| Тип | paper |
| DOI | 10.1088/0022-3727/21/6/014 |
| Electronic ISSN | 1361-6463 |
| Print ISSN | 0022-3727 |
| Журнал | Journal of Physics D: Applied Physics |
| Том | 21 |
| Первая страница | 951 |
| Последняя страница | 955 |
| Аффилиация | I Lin; Mater. Res. Corp., Orangeburg, NY, USA |
| Аффилиация | R L Sandstrom; Mater. Res. Corp., Orangeburg, NY, USA |
| Аффилиация | F Pasierb; Mater. Res. Corp., Orangeburg, NY, USA |
| Аффилиация | D C Hinson; Mater. Res. Corp., Orangeburg, NY, USA |
| Выпуск | 6 |
