Low resistance contacts to Y-Ba-Cu-O thin films
Q X Jia; W A Anderson; Q X Jia; Dept. of Electr. & Comput. Eng., State Univ. of New York, Amherst, NY, USA; W A Anderson; Dept. of Electr. & Comput. Eng., State Univ. of New York, Amherst, NY, USA
Журнал:
Journal of Physics D: Applied Physics
Дата:
1989-10-14
Аннотация:
Ytterbium (Yb), was thermally evaporated onto the Y-Ba-Cu-O thin film surface to form an ohmic contact. Specific surface contact resistance in the 10<sup>-6</sup> Omega cm<sup>2</sup> range was achieved for an as-deposited single layer Yb contact. Specific surface resistance in the 10<sup>-9</sup> Omega cm<sup>2</sup> range was achieved by using multilayer metal contacts, such as Yb/Cr/Al. These metals used for high-quality ohmic contacts to superconductor thin films are of significance due to their compatibility with semiconductor electronic devices.
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