| Автор | A Brand |
| Автор | J L R Muzart |
| Автор | A R de Souza |
| Дата выпуска | 1990-10-14 |
| dc.description | The authors investigate the validity of the rotational distribution of N<sub>2</sub><sup>+</sup>(B) to N<sub>2</sub><sup>+</sup>(X) emissions as a tool to determine the substrate temperature in surface treatment reactors. They show that the method is not valid for processes involving pure nitrogen at p>1.3*10<sup>2</sup> Pa. In N<sub>2</sub>-H<sub>2</sub> mixtures, however, they show that the technique can be used for temperature measurements for all pressure intervals normally used in ion nitriding treatments. This discrepancy is interpreted in terms of excitation paths of the N<sub>2</sub><sup>+</sup>(B) state in the plasma reactor. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Note on the temperature measurements in surface treatment reactors using the spectroscopic method |
| Тип | lett |
| DOI | 10.1088/0022-3727/23/10/014 |
| Electronic ISSN | 1361-6463 |
| Print ISSN | 0022-3727 |
| Журнал | Journal of Physics D: Applied Physics |
| Том | 23 |
| Первая страница | 1334 |
| Последняя страница | 1335 |
| Аффилиация | A Brand; Dept. de Fisica, Univ. Federal de Santa Catarina, Florianopolis, Brazil |
| Аффилиация | J L R Muzart; Dept. de Fisica, Univ. Federal de Santa Catarina, Florianopolis, Brazil |
| Аффилиация | A R de Souza; Dept. de Fisica, Univ. Federal de Santa Catarina, Florianopolis, Brazil |
| Выпуск | 10 |
