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Автор G G Lister
Дата выпуска 1992-12-14
dc.description Low-pressure gas discharge modeling is reviewed, both from a historical perspective and for current industrial applications. An overview of the basic mathematical and physical models used to describe low-pressure discharges is given, together with a summary of the most common numerical techniques which have been adopted. Modelling of the DC glow discharge and discharges maintained by high-frequency (RF and microwave) electromagnetic fields is reviewed with illustrations of the validity of these models in predicting discharge properties and explaining and interpreting experimental results.
Формат application.pdf
Издатель Institute of Physics Publishing
Название Low-pressure gas discharge modelling
Тип rev
DOI 10.1088/0022-3727/25/12/001
Electronic ISSN 1361-6463
Print ISSN 0022-3727
Журнал Journal of Physics D: Applied Physics
Том 25
Первая страница 1649
Последняя страница 1680
Аффилиация G G Lister; Thorn EMI Central Res. Lab., Hayes, UK
Выпуск 12

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