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Автор I L Shulpina
Дата выпуска 1993-04-14
dc.description The author describes recent results in the detection and study of as-grown microdefects in float-zoned (FZ) silicon single crystals by X-ray topographic methods. They show that plane-wave topography displays the highest sensitivity to slight displacement fields around the microdefects. The actual microdefect can be characterized through the comparison of the experimental topographs with its image simulated under the same diffraction conditions. It is thus possible to determine the type, nature, size, location and misfit volume of the microdefect. Another way to investigate microdefects is described, based on the study of microdefect dislocation activity by conventional methods of X-ray topography.
Формат application.pdf
Издатель Institute of Physics Publishing
Название Microdefects investigated by X-ray topography
Тип paper
DOI 10.1088/0022-3727/26/4A/019
Electronic ISSN 1361-6463
Print ISSN 0022-3727
Журнал Journal of Physics D: Applied Physics
Том 26
Первая страница A82
Последняя страница A85
Аффилиация I L Shulpina; AF Ioffe Phys.-Tech. Inst., Russian Acad. of Sci., St. Petersburg, Russia
Выпуск 4A

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