A study of laser-deposited PZT, PLZT, PMN and YBCO thin films
V Trtik; M Jelinek; E B Kluenkov; V Trtik; Inst. of Phys., Czech Acad. of Sci., Prague, Czech Republic; M Jelinek; Inst. of Phys., Czech Acad. of Sci., Prague, Czech Republic; E B Kluenkov; Inst. of Phys., Czech Acad. of Sci., Prague, Czech Republic
Журнал:
Journal of Physics D: Applied Physics
Дата:
1994-07-14
Аннотация:
The preparation of epitaxial thin films of Pb(Zr<sub>x</sub>Ti<sub>1-x</sub>)O<sub>3</sub>(0.75, 0.25), Pb(Zr<sub>x</sub>Ti<sub>1-x</sub>)O<sub>3</sub>(0.52, 0.48) Pb<sub>1-x</sub>La<sub>x</sub>(Zr<sub>y</sub>Ti<sub>z</sub>)<sub>1-(x</sub>4)/O<sub>3</sub>(0.09, 0.65, 0.35), PbMg<sub>1</sub>3/Nb<sub>2</sub>3/O<sub>3</sub> by means of pulsed laser ablation on YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-x</sub> coated (100)SrTiO<sub>3</sub> and (110)SrTiO<sub>3</sub> substrates is reported. The films have been characterized by X-ray diffraction, Rutherford backscattering, scanning electron microscopy and electrical measurements. High-quality ferroelectric films were obtained at substrate temperature of 550, 520 and 550 degrees C for Pb(Zr<sub>x</sub>Ti<sub>1</sub>-<sub>x</sub>)O<sub>3</sub>, Pb<sub>1-x</sub>La<sub>x</sub>(Zr<sub>y</sub>Ti<sub>z</sub>)<sub>1-(x</sub>4)/O<sub>3</sub> and PbMg<sub>1</sub>3/Nb<sub>2</sub>3/O<sub>3</sub>, respectively. X-ray diffraction studies of the Pb(Zr<sub>x</sub>Ti<sub>1-x</sub>)O<sub>3</sub>/YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-x</sub>/(100)SrTiO<sub>3</sub> show that the layers grow in the c axis orientation with a rocking angle of 0.4 degrees -0.6 degrees for the YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-x</sub> and 0.8 degrees -1 degrees for the Pb(Zr<sub>x</sub>Ti<sub>1-x</sub>)O<sub>3</sub> layers. The remanent polarization and coercive field of the Pb(Zr<sub>x</sub>Ti<sub>1-x</sub>)O<sub>3</sub>(0.52, 0.48) film were 42 mu C cm<sup>-2</sup> and 55 kV cm<sup>-1</sup>.
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