The influence of the respective durations of the discharge and the afterglow on the reactivity of a DC pulsed plasma used for iron nitriding
Robert Hugon; Michel Fabry; Gérard Henrion; Robert Hugon; Laboratoire de Physique des Milieux Ionisés, Université Henri Poincaré Nancy 1, URA 835 du CNRS, BP 239, F-54506 Vandoeuvre Cedex, France; Michel Fabry; Laboratoire de Physique des Milieux Ionisés, Université Henri Poincaré Nancy 1, URA 835 du CNRS, BP 239, F-54506 Vandoeuvre Cedex, France; Gérard Henrion; Laboratoire de Physique des Milieux Ionisés, Université Henri Poincaré Nancy 1, URA 835 du CNRS, BP 239, F-54506 Vandoeuvre Cedex, France
Журнал:
Journal of Physics D: Applied Physics
Дата:
1996-03-14
Аннотация:
The optical diagnostics of a DC pulsed plasma used for iron nitriding is carried out for various plasma conditions. The fluorescence of the first negative and the second positive systems of is observed in the time afterglow, in order to obtain some insights into the creation and the loss processes of and states. An iron emission line is also observed which is indicative of the sample sputtering. Particular attention is paid to the influence of the gas pressure on the respective durations of the discharge and the afterglow. Analysis of the plasma both during the discharge and during the post-discharge leads to the determination of favourable conditions for the surface treatment. It is also shown that the electron density in the discharge can be deduced from the line intensity decay in the afterglow.
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