| Автор | T Giaddui |
| Автор | K S Forcey |
| Автор | L G Earwaker |
| Автор | A Loni |
| Автор | L T Canham |
| Автор | A Halimaoui |
| Дата выпуска | 1996-06-14 |
| dc.description | Ion beam analysis data are presented on both freshly prepared and `aged' porous silicon layers of widely varying (10 - 85%) porosity. Both evaporated Al and PECVD surface capping layers are shown to suppress some of the rapid ion beam induced changes in chemical composition that have been reported during analysis of uncapped layers. Specifically, these capping layers were successful in eliminating carbon and oxygen accumulation within the material but they only slightly reduced hydrogen loss under ion bombardment. Evaporated aluminium surface capping layers were partially successful in suppressing long term ambient oxygen pick-up. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Reduction of ion beam induced and atmospheric ageing of porous silicon using Al and caps |
| Тип | paper |
| DOI | 10.1088/0022-3727/29/6/025 |
| Electronic ISSN | 1361-6463 |
| Print ISSN | 0022-3727 |
| Журнал | Journal of Physics D: Applied Physics |
| Том | 29 |
| Первая страница | 1580 |
| Последняя страница | 1586 |
| Выпуск | 6 |
