| Автор | Ning Xu |
| Автор | Yuancheng Du |
| Автор | Zhifeng Ying |
| Автор | Zhongmin Ren |
| Автор | Fuming Li |
| Автор | Jing Lin |
| Автор | Yunzhu Ren |
| Автор | Xiangfu Zong |
| Дата выпуска | 1997-05-07 |
| dc.description | An exhaustive study of optical emission from a nitrogen arc produced by an arc-heated beam source is reported. Atomic nitrogen emission lines in the spectral region provide unequivocal evidence that the arc-heated beam source generates an appreciable flux of nitrogen atoms. Experimental results show that the ratio of [N] to increased as the arc pressure decreased. It is believed that this is because of the reduced probability of recombination of [N] atoms. Using this arc-heated beam source for pulsed laser deposition (PLD) film growth, we have synthesized carbon nitride and other nitride films with a high nitrogen content. AES and XPS results indicate that composition ratios ([N]/[C]) in the deposited films were between 0.2 and 0.6. It has been considered that [N] atoms, rather than molecules in the arc, are the most likely species responsible for the synthesis of nitride films. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Optical emission spectroscopy of the nitrogen arc in an arc-heated beam source used for synthesis of carbon nitride films |
| Тип | paper |
| DOI | 10.1088/0022-3727/30/9/012 |
| Electronic ISSN | 1361-6463 |
| Print ISSN | 0022-3727 |
| Журнал | Journal of Physics D: Applied Physics |
| Том | 30 |
| Первая страница | 1370 |
| Последняя страница | 1376 |
| Выпуск | 9 |
