Planar optical waveguides were produced by exchange of for of Z-cut (KTP). The results of a systematic study of Rb:KTP and Cs:KTP waveguides obtained by combining measurements of the mode propagation constants, optical profiles and Raman scattering spectra are reported. The analysis of the refractive index profiles has shown that there is an exponential distribution in the exchanged layers. Some dependences of the waveguide characteristics on the fabrication conditions are presented. Micro-Raman spectra have revealed a notable difference compared with the spectra of pure KTP in the range of external lattice modes as well as in the range of torsional vibrations of octahedra. The exchanged layers exhibit lower perfection of the crystal lattice than that of pure KTP and effects of symmetry changes.