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Автор Cong-Feng Wu
Автор Shuai Wu
Автор Ru-Juan Zhan
Дата выпуска 1998-12-21
dc.description Investigation of the spatial distribution of plasma parameters has shown that a large diameter uniform plasma (over 160 mm) can be sustained over a broad pressure range (10 - 230 Pa) by a surface wave at 2.45 GHz. Optical emissions testify the existence of azimuthal modes of m = 4 at a pressure of 10 Pa and m = 6 at a pressure of 230 Pa. The electric field of the m = 4 mode, on which the plasma distribution strongly depends, has also been studied.
Формат application.pdf
Издатель Institute of Physics Publishing
Название Spatial investigation of a large diameter surface wave-excited plasma and its electromagnetic mode
Тип lett
DOI 10.1088/0022-3727/31/24/001
Electronic ISSN 1361-6463
Print ISSN 0022-3727
Журнал Journal of Physics D: Applied Physics
Том 31
Первая страница L89
Последняя страница L92
Выпуск 24

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