| Автор | Xiaokui Qin |
| Автор | Ken Suzuki |
| Автор | Yasuhiro Tanaka |
| Автор | Tatsuo Takada |
| Дата выпуска | 1999-01-21 |
| dc.description | A three-dimensional space-charge measurement system using the acoustic lens and PWP method has been developed. The resolutions on the x-y plane and in the z direction of this system are about and m respectively. It takes about 3 s for each sample position and 130 min for positions on the x-y plane for a mm specimen. This speed is much higher than that of the three-dimensional space-charge measurement system using the PEA method. Although the resolutions of this system on the x-y plane and along the z direction are not high, the three-dimensional charge profile of an electron-beam-irradiated PMMA specimen is successfully constructed. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Three-dimensional space-charge measurement in a dielectric using the acoustic lens and PWP method |
| Тип | paper |
| DOI | 10.1088/0022-3727/32/2/013 |
| Electronic ISSN | 1361-6463 |
| Print ISSN | 0022-3727 |
| Журнал | Journal of Physics D: Applied Physics |
| Том | 32 |
| Первая страница | 157 |
| Последняя страница | 160 |
| Выпуск | 2 |
