Performance of a twin parallel-plate energy analyser for scattered and sputtered particles
A van Veen; A G J de Wit; G A van de Schootbrugge; J M Fluit; A van Veen; Fysisch Lab., Rijksuniv. Utrecht, Utrecht, Netherlands; A G J de Wit; Fysisch Lab., Rijksuniv. Utrecht, Utrecht, Netherlands; G A van de Schootbrugge; Fysisch Lab., Rijksuniv. Utrecht, Utrecht, Netherlands; J M Fluit; Fysisch Lab., Rijksuniv. Utrecht, Utrecht, Netherlands
Журнал:
Journal of Physics E: Scientific Instruments
Дата:
1979-09-01
Аннотация:
The design and performance are described of the electrostatic analyser. Transmission properties of the analysing system are derived analytically, compared with corresponding computer calculations and checked by means of control measurements. Applications of the system are given for angular and energy distribution measurements of particles (ions and neutralised ions) scattered from a copper surface bombarded with noble gas ions and copper atoms sputtered from a copper surface. The performance of the system is compared with other analysing systems commonly used for measuring neutral particles.
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