A hollow cathode arc as a high intensity beam source for ground state and metastable noble gas atoms in the eV translational energy range
P G A Theuws; H C W Beijerinck; N F Verster; D C Schram; P G A Theuws; Phys. Dept., Eindhoven Univ. of Technol., Eindhoven, Netherlands; H C W Beijerinck; Phys. Dept., Eindhoven Univ. of Technol., Eindhoven, Netherlands; N F Verster; Phys. Dept., Eindhoven Univ. of Technol., Eindhoven, Netherlands; D C Schram; Phys. Dept., Eindhoven Univ. of Technol., Eindhoven, Netherlands
Журнал:
Journal of Physics E: Scientific Instruments
Дата:
1982-05-01
Аннотация:
The medium density plasma column (n approximately=10<sup>22</sup> m<sup>-3</sup>) close to the exit of the cathode of a hollow cathode arc is highly ionised, with ion and electron temperatures T<sub>i</sub> approximately=0.5-1.5 eV and T<sub>e</sub> approximately=3 eV, respectively. By sampling this plasma with an orifice in the end anode (at a floating potential) a high intensity beam with a broad velocity distribution is obtained for the noble gas atoms Ne, Ar and Kr, both in the ground state and in metastable states n*. Typical centre-line intensities for argon are I(0)=2*10<sup>18</sup> s<sup>-1</sup> sr<sup>-1</sup>, T=2*10<sup>4</sup>K and I(0)<sub>n*</sub>=2*10<sup>14</sup> s<sup>-1</sup> sr<sup>-1</sup>, T<sub>n*</sub>=3*10<sup>4</sup>K. These values are in good agreement with model calculations of the process of molecular beam sampling, which are discussed in this paper. The source is of a simple design and easy to operate. The life time of the tungsten (or tantalum) hollow cathode is typically 40 h for argon and krypton. The shortest life time is for neon with a tungsten cathode, due to the high operating temperature T approximately=3000K of the cathode tip.
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