| Автор | T R Hicks |
| Автор | N K Reay |
| Автор | P D Atherton |
| Дата выпуска | 1984-01-01 |
| dc.description | Using the technique of capacitance micrometry it is possible to measure very small displacements. The authors describe the application of this technique to the control of piezo-scanned Fabry-Perot etalons using a closed-loop feedback system. This system removes the problem of the nonlinear response and hysteresis associated with piezoelectric transducers and allows precise control of both etalon gap and parallelism. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | The application of capacitance micrometry to the control of Fabry-Perot etalons |
| Тип | paper |
| DOI | 10.1088/0022-3735/17/1/010 |
| Print ISSN | 0022-3735 |
| Журнал | Journal of Physics E: Scientific Instruments |
| Том | 17 |
| Первая страница | 49 |
| Последняя страница | 55 |
| Аффилиация | T R Hicks; Queensgate Instruments Ltd., Blackett Lab., London, UK |
| Аффилиация | N K Reay; Queensgate Instruments Ltd., Blackett Lab., London, UK |
| Аффилиация | P D Atherton; Queensgate Instruments Ltd., Blackett Lab., London, UK |
| Выпуск | 1 |
