A side-entry liquid He cooled stage for the Philips EM400 electron microscope (ion implantation application)
M Salome; B Raynaud; M Schack; J Chaumont; M O Ruault; H Bernas; M Salome; Centre de Spectrometrie Nucl. et de Spectrometrie de Masse, Orsay, France; B Raynaud; Centre de Spectrometrie Nucl. et de Spectrometrie de Masse, Orsay, France; M Schack; Centre de Spectrometrie Nucl. et de Spectrometrie de Masse, Orsay, France; J Chaumont; Centre de Spectrometrie Nucl. et de Spectrometrie de Masse, Orsay, France; M O Ruault; Centre de Spectrometrie Nucl. et de Spectrometrie de Masse, Orsay, France; H Bernas; Centre de Spectrometrie Nucl. et de Spectrometrie de Masse, Orsay, France
Журнал:
Journal of Physics E: Scientific Instruments
Дата:
1985-04-01
Аннотация:
The authors describe a liquid He cooled stage for the side entry goniometer of the Philips EM400 transmission electron microscope (TEM). A stable temperature of 10K is reached on the specimen. The resolution is 15 AA (1.5 mm) at about 15K. Calculations taking into account electron and ion beam heating are detailed.
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