A compact electron-beam metal vapour source with integral cooling and shutter
J S G Taylor; D A Newstead; J S G Taylor; Dept. of Phys., Leicester Univ., UK; D A Newstead; Dept. of Phys., Leicester Univ., UK
Журнал:
Journal of Physics E: Scientific Instruments
Дата:
1987-10-01
Аннотация:
A simple compact ultra-high-vacuum (UHV) electron-beam evaporator, to deposit ultra-thin layers of low vapour pressure, high melting point transition metals is described. It has an integral cryoshield and shutter which will fit a UHV system with a standard 70 mm flange.
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