| Автор | A W van Herwaarden |
| Автор | P M Sarro |
| Дата выпуска | 1988-12-01 |
| dc.description | A quantitative insight is given into the performance of integrated thermopile vacuum sensors as a vacuum gauge. After a short resume of their operation principle three pressure ranges are discussed. The zero repeatability is shown to be approximately 10 mPa. In the optimum pressure range of 1-100 Pa the error of prediction of the sensors is 2-3% while the upper pressure limit of the sensors is of the order of 5-50 kPa. A comparison with conventional Pirani gauges is made. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Performance of integrated thermopile vacuum sensors |
| Тип | paper |
| DOI | 10.1088/0022-3735/21/12/009 |
| Print ISSN | 0022-3735 |
| Журнал | Journal of Physics E: Scientific Instruments |
| Том | 21 |
| Первая страница | 1162 |
| Последняя страница | 1167 |
| Аффилиация | A W van Herwaarden; Dept. of Electr. Eng., Delft Univ. of Technol., Netherlands |
| Аффилиация | P M Sarro; Dept. of Electr. Eng., Delft Univ. of Technol., Netherlands |
| Выпуск | 12 |
