| Автор | U Valdrè |
| Автор | E A Robinson |
| Автор | D W Pashley |
| Автор | M J Stowell |
| Автор | T J Law |
| Дата выпуска | 1970-07-01 |
| dc.description | A differentially pumped specimen stage is described which allows thin film deposition studies to be carried out inside an electron microscope. The pressure in the specimen vicinity can be reduced to about 10 ntorr after 16 hours pumping, and it is shown that meaningful studies of thin film growth of reactive materials are now possible. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | An ultra-high vacuum electron microscope specimen chamber for vapour deposition studies |
| Тип | paper |
| DOI | 10.1088/0022-3735/3/7/306 |
| Print ISSN | 0022-3735 |
| Журнал | Journal of Physics E: Scientific Instruments |
| Том | 3 |
| Первая страница | 501 |
| Последняя страница | 506 |
| Выпуск | 7 |
