The twin anode electrostatic ion gun with thermionic electron injection
G J Rushton; R K Fitch; G J Rushton; Univ. Aston, Birmingham, UK; R K Fitch; Univ. Aston, Birmingham, UK
Журнал:
Journal of Physics E: Scientific Instruments
Дата:
1974-04-01
Аннотация:
The operating voltage and pressure of the twin anode electrostatic ion gun have been reduced and the range of applications extended by incorporating a thermionic source of electrons. The construction and performance of the ion gun is described. The energy of the emerging ion beam has been reduced and thus the ions will produce less structural damage to any specimen under ion bombardment. This ion gun should have applications in ultra high vacuum.
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