| Автор | M G Dowsett |
| Автор | R M King |
| Автор | E H C Parker |
| Дата выпуска | 1975-08-01 |
| dc.description | Describes how an argon ion gun intended for sputter cleaning, and a quadrupole residual gas analyser (QRGA) have been adapted for use in low current, low energy secondary ion mass spectroscopy (SIMS). Minor external modifications including the fitting of a new type of axial electrostatic energy filter in front of the QRGA make secondary ion detection feasible. The spectrometer may be used for surface analysis; secondary ion spectra are presented from stainless steel type 316, and from mica and sapphire. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Modification of existing apparatus for SIMS in UHV |
| Тип | paper |
| DOI | 10.1088/0022-3735/8/8/025 |
| Print ISSN | 0022-3735 |
| Журнал | Journal of Physics E: Scientific Instruments |
| Том | 8 |
| Первая страница | 704 |
| Последняя страница | 708 |
| Аффилиация | M G Dowsett; Dept. of Phys., City of London Polytech., London, UK |
| Аффилиация | R M King; Dept. of Phys., City of London Polytech., London, UK |
| Аффилиация | E H C Parker; Dept. of Phys., City of London Polytech., London, UK |
| Выпуск | 8 |
