Interface reactions and electrical properties of metal contacts (Ti, In, Au, W) on p-ZnSe
Fred Goesmann; Matthias Mölle; Thomas Studnitzky; Rainer Schmid-Fetzer; Fred Goesmann; Technische Universität Clausthal, AG Elektronische Materialien, Robert-Koch-Straße 42, D-38678 Clausthal-Zellerfeld, Germany; Matthias Mölle; Technische Universität Clausthal, AG Elektronische Materialien, Robert-Koch-Straße 42, D-38678 Clausthal-Zellerfeld, Germany; Thomas Studnitzky; Technische Universität Clausthal, AG Elektronische Materialien, Robert-Koch-Straße 42, D-38678 Clausthal-Zellerfeld, Germany; Rainer Schmid-Fetzer; Technische Universität Clausthal, AG Elektronische Materialien, Robert-Koch-Straße 42, D-38678 Clausthal-Zellerfeld, Germany
Журнал:
Semiconductor Science and Technology
Дата:
1998-02-01
Аннотация:
In this study interfacial reactions and electrical properties of Ti, In, Au and W on ZnSe are presented. The combination of these two aspects of contact formation is very useful for the assessment of contact preparation procedures. Firstly the thermodynamic equilibria in the ternary metal-Zn-Se systems were evaluated. Secondly bulk diffusion experiments on the metals on ZnSe crystals were performed. Thirdly the electrical properties of the metal-p-type ZnSe contacts were evaluated and correlated to the results of the phase equilibrium and diffusion studies. Ti and In form ohmic contacts on p-type ZnSe but the mechanism is different. With Ti an interface reaction occurs; with In a solution of surface contaminations in the liquid metal film seems probable. Au and W are not very useful as electrical contacts. Neither reacts with the semiconductor. Au yields irreproducible electrical properties; W contacts show a very bad adherence to the semiconductor.
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