Optoelectronic properties of amorphous hydrogenated silicon-germanium alloys
G Conte; D Della Sala; F Galluzzi; G Grillo; C Ostrifate; C Reita; G Conte; Eniricerche SpA, Roma, Italy; D Della Sala; Eniricerche SpA, Roma, Italy; F Galluzzi; Eniricerche SpA, Roma, Italy; G Grillo; Eniricerche SpA, Roma, Italy; C Ostrifate; Eniricerche SpA, Roma, Italy; C Reita; Eniricerche SpA, Roma, Italy
Журнал:
Semiconductor Science and Technology
Дата:
1990-08-01
Аннотация:
A study on amorphous hydrogenated silicon-germanium alloys is presented. Amorphous thin films are grown by glow discharge decomposition of silane/germane gas mixtures, in the presence of a large hydrogen concentration. Optical, electrical and photoelectrical properties of intrinsic alloys are reported and their effect on the performance of p-i-n photovoltaic devices is discussed.
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