Автор |
M G Daly |
Автор |
D M Bruce |
Автор |
P E Jessop |
Автор |
D T Cassidy |
Автор |
D Yevick |
Дата выпуска |
1994-07-01 |
dc.description |
Although contact metallization causes stress in the underlying material, the magnitude of the resulting change in refractive index is often not appreciated. We investigate here the distribution of the change in refractive index due to stress caused by Ti/Pt/Au contact layers in weakly guiding InGaAsP waveguides operating near 1.3 mu m. Polarization-resolved photoluminescence and beam propagation calculations, combined with a simple stress model, are applicable to general processing-induced stress in InP-based waveguides and to waveguide design. |
Формат |
application.pdf |
Издатель |
Institute of Physics Publishing |
Название |
Metallization stress in weakly guiding InP/InGaAsP waveguides |
Тип |
paper |
DOI |
10.1088/0268-1242/9/7/016 |
Electronic ISSN |
1361-6641 |
Print ISSN |
0268-1242 |
Журнал |
Semiconductor Science and Technology |
Том |
9 |
Первая страница |
1387 |
Последняя страница |
1390 |
Аффилиация |
M G Daly; Centre for Electrophotonic Mater. & Devices, McMaster Univ., Hamilton, Ont., Canada |
Аффилиация |
D M Bruce; Centre for Electrophotonic Mater. & Devices, McMaster Univ., Hamilton, Ont., Canada |
Аффилиация |
P E Jessop; Centre for Electrophotonic Mater. & Devices, McMaster Univ., Hamilton, Ont., Canada |
Аффилиация |
D T Cassidy; Centre for Electrophotonic Mater. & Devices, McMaster Univ., Hamilton, Ont., Canada |
Аффилиация |
D Yevick; Centre for Electrophotonic Mater. & Devices, McMaster Univ., Hamilton, Ont., Canada |
Выпуск |
7 |