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Автор D W F James
Автор C Lewis
Дата выпуска 1965-08-01
dc.description A study has been made of the growth of single crystal silicon by the recently proposed vapour-liquid-solid mechanism. The reduction of silicon tetrachloride with hydrogen has been used to deposit silicon via thin liquid alloy zones of gold/silicon and nickel/silicon on to single crystal substrates.Epitaxial layers and orientated whiskers are obtained using gold, while the growth from nickel appears random. Various growth forms are explained in terms of the temperature variation of the surface tension of the liquid alloy. The work emphasizes the value of the vapour-liquid-solid mechanism and has shown the importance of temperature and temperature gradients in its control.
Формат application.pdf
Издатель Institute of Physics Publishing
Название Silicon whisker growth and epitaxy by the vapour-liquid-solid mechanism
Тип paper
DOI 10.1088/0508-3443/16/8/305
Print ISSN 0508-3443
Журнал British Journal of Applied Physics
Том 16
Первая страница 1089
Последняя страница 1094
Аффилиация D W F James; Department of Materials Science, University College of North Wales, Bangor
Аффилиация C Lewis; Department of Materials Science, University College of North Wales, Bangor
Выпуск 8

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