Автор |
M A C S Brown |
Автор |
E Jakeman |
Дата выпуска |
1966-09-01 |
dc.description |
The use of the four-point probe technique to measure the conductivity of epitaxial layers may be complicated by the presence of a substrate of finite conductivity. Assuming the boundary between the two layers to be perfectly conducting, we derive a relationship between experimentally measurable quantities and the unknown conductivity for such cases. We evaluate these new relationships numerically when the conductivity of the layer is greater than that of the substrate for a range of layer thicknesses, conductivities and probe spacing. We give a comparison with experiment which verifies the theory and shows that it gives results which differ significantly from those calculated using the existing theory of measurements on thin slices. |
Формат |
application.pdf |
Издатель |
Institute of Physics Publishing |
Название |
Theory of the four-point probe technique as applied to the measurement of the conductivity of thin layers on conducting substrates |
Тип |
paper |
DOI |
10.1088/0508-3443/17/9/305 |
Print ISSN |
0508-3443 |
Журнал |
British Journal of Applied Physics |
Том |
17 |
Первая страница |
1143 |
Последняя страница |
1148 |
Аффилиация |
M A C S Brown; Royal Radar Establishment, Gt. Malvern, Worcs |
Аффилиация |
E Jakeman; Royal Radar Establishment, Gt. Malvern, Worcs |
Выпуск |
9 |