Sorption and desorption of gas in the cold-cathode ionization gauge
J H Leck; J H Leck; Department of Electrical Engineering, The University of Liverpool
Журнал:
Journal of Scientific Instruments
Дата:
1953-08-01
Аннотация:
The rate of clean-up, between 10<sup>-6</sup> and 10<sup>-4</sup> mm of mercury, has been measured for a variety of gases and vapours, such as nitrogen, argon and water vapour. The effect on the accuracy of the gauge has been estimated. The errors introduced depend both on the design of gauge and on the gas present in the vacuum system.
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