An improved Czochralski crystal-pulling furnace
K H J C Marshall; R Wickham; K H J C Marshall; Services Electronics Research Laboratory, Baldock, Herts; R Wickham; Services Electronics Research Laboratory, Baldock, Herts
Журнал:
Journal of Scientific Instruments
Дата:
1958-04-01
Аннотация:
A furnace suitable for pulling single crystals of germanium and silicon has been made. This apparatus differs from previous designs in that it combines rapidity of set-up with ease of operation and almost perfect vision during the crystal-growing cycle. The heating element is of resistance heated graphite and provision is made for growing either in vacuum or in an inert gas atmosphere.
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