A low energy ion gun for bombarding small specimens
P Bowden; D G Brandon; P Bowden; Metallurgy Department, University of Cambridge; D G Brandon; Metallurgy Department, University of Cambridge
Журнал:
Journal of Scientific Instruments
Дата:
1963-05-01
Аннотация:
A low energy ion source for bombarding electron microscope specimens is described. The source is capable of delivering a current of 0.3 μA of 100 eV argon ions to an area 2.0 mm in diameter.
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