Автор |
Masakazu Takahashi |
Автор |
Yoshiaki Takai |
Дата выпуска |
1998-03-01 |
dc.description |
We prepared superconducting films at lower temperatures by a pulsed laser deposition method. The growth temperature usually decreased with decreasing oxygen pressure in the deposition chamber. However, the superconducting critical temperature of the films deposited at a low oxygen pressure was drastically degraded because of insufficient oxidation. In this work, we employed a mixed gas consisting of oxygen and ozone as the oxidation gas. As a result, increased to 86 K, when films were deposited in a low-pressure oxygen atmosphere (5 mTorr) mixed with ozone (5 mol%) and at a low laser fluence of . In addition to superconducting properties, the surface morphology could be improved by using low-pressure oxygen gas mixed with ozone and by optimizing the laser fluence. |
Формат |
application.pdf |
Издатель |
Institute of Physics Publishing |
Название |
Low-temperature growth of by pulsed laser deposition |
Тип |
paper |
DOI |
10.1088/0953-2048/11/3/002 |
Electronic ISSN |
1361-6668 |
Print ISSN |
0953-2048 |
Журнал |
Superconductor Science and Technology |
Том |
11 |
Первая страница |
265 |
Последняя страница |
269 |
Аффилиация |
Masakazu Takahashi; Department of Energy Engineering and Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603, Japan |
Аффилиация |
Yoshiaki Takai; Department of Energy Engineering and Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603, Japan |
Выпуск |
3 |