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Автор Masakazu Takahashi
Автор Yoshiaki Takai
Дата выпуска 1998-03-01
dc.description We prepared superconducting films at lower temperatures by a pulsed laser deposition method. The growth temperature usually decreased with decreasing oxygen pressure in the deposition chamber. However, the superconducting critical temperature of the films deposited at a low oxygen pressure was drastically degraded because of insufficient oxidation. In this work, we employed a mixed gas consisting of oxygen and ozone as the oxidation gas. As a result, increased to 86 K, when films were deposited in a low-pressure oxygen atmosphere (5 mTorr) mixed with ozone (5 mol%) and at a low laser fluence of . In addition to superconducting properties, the surface morphology could be improved by using low-pressure oxygen gas mixed with ozone and by optimizing the laser fluence.
Формат application.pdf
Издатель Institute of Physics Publishing
Название Low-temperature growth of by pulsed laser deposition
Тип paper
DOI 10.1088/0953-2048/11/3/002
Electronic ISSN 1361-6668
Print ISSN 0953-2048
Журнал Superconductor Science and Technology
Том 11
Первая страница 265
Последняя страница 269
Аффилиация Masakazu Takahashi; Department of Energy Engineering and Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603, Japan
Аффилиация Yoshiaki Takai; Department of Energy Engineering and Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603, Japan
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