| Автор | H Sato |
| Автор | F J G Roesthuis |
| Автор | A H Sonnenberg |
| Автор | A J H M Rijnders |
| Автор | H Rogalla |
| Автор | D H A Blank |
| Дата выпуска | 2000-05-01 |
| dc.description | We studied the morphology of ramps in YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-δ</sub> films and, subsequently, the barrier layer. The ramps have been fabricated by Ar ion beam milling using standard photoresist masks. SEM and AFM showed the formation of tracks along the slope of the ramp, originating from the irregular shape of the edge of the photoresist mask. A proposed modified reflowed resist and pre-annealing process show a significantly smoother ramp surface, important for the fabrication of reproducible Josephson junctions. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Investigation of the microstructure of ramp-type YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-δ</sub> structures |
| Тип | paper |
| DOI | 10.1088/0953-2048/13/5/319 |
| Electronic ISSN | 1361-6668 |
| Print ISSN | 0953-2048 |
| Журнал | Superconductor Science and Technology |
| Том | 13 |
| Первая страница | 522 |
| Последняя страница | 526 |
| Аффилиация | H Sato; Low Temperature Division and MESA<sup>+</sup> Research Institute, University of Twente, PO Box 217, 7500 AE, Enschede, The Netherlands |
| Аффилиация | F J G Roesthuis; Low Temperature Division and MESA<sup>+</sup> Research Institute, University of Twente, PO Box 217, 7500 AE, Enschede, The Netherlands |
| Аффилиация | A H Sonnenberg; Low Temperature Division and MESA<sup>+</sup> Research Institute, University of Twente, PO Box 217, 7500 AE, Enschede, The Netherlands |
| Аффилиация | A J H M Rijnders; Low Temperature Division and MESA<sup>+</sup> Research Institute, University of Twente, PO Box 217, 7500 AE, Enschede, The Netherlands |
| Аффилиация | H Rogalla; Low Temperature Division and MESA<sup>+</sup> Research Institute, University of Twente, PO Box 217, 7500 AE, Enschede, The Netherlands |
| Аффилиация | D H A Blank; Low Temperature Division and MESA<sup>+</sup> Research Institute, University of Twente, PO Box 217, 7500 AE, Enschede, The Netherlands |
| Выпуск | 5 |
