| Автор | J Beyer |
| Автор | Th Schurig |
| Автор | A Lüdge |
| Автор | H Riemann |
| Дата выпуска | 2000-05-01 |
| dc.description | We developed a SQUID-based, noninvasive method for the investigation of semiconductor wafers. It is based on the detection of excited photocurrents via their magnetic field by means of a highly sensitive SQUID system. Our method allows the visualization of small growth-related fluctuations of the doping level of the semiconductor with a spatial resolution of a few tens of a micrometre determined by the excitation spot size. Numerical simulations of the magnetic signals have been performed, the results of which show a reasonable agreement with the experiments. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | SQUID-NDE of semiconductor samples with high spatial resolution |
| Тип | paper |
| DOI | 10.1088/0953-2048/13/5/321 |
| Electronic ISSN | 1361-6668 |
| Print ISSN | 0953-2048 |
| Журнал | Superconductor Science and Technology |
| Том | 13 |
| Первая страница | 532 |
| Последняя страница | 536 |
| Выпуск | 5 |
