High resolution patterning of high T<sub>c</sub> superconducting thin films
Z G Ivanov; P -A Nilsson; E -K Andersson; T Claeson; Z G Ivanov; Chalmers Univ. of Technol., Goteborg, Sweden; P -A Nilsson; Chalmers Univ. of Technol., Goteborg, Sweden; E -K Andersson; Chalmers Univ. of Technol., Goteborg, Sweden; T Claeson; Chalmers Univ. of Technol., Goteborg, Sweden
Журнал:
Superconductor Science and Technology
Дата:
1991-01-01
Аннотация:
Micron and sub-micron size microbridges have been patterned in high T<sub>c</sub> films. The degradation of superconductivity caused by ion beam etching and subsequent processing was minimized by using a thin silver buffer layer. Lift-off technology and post-annealing gave narrow microbridges with good Josephson response.
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