Автор |
J C Nie |
Автор |
L Chen |
Автор |
L Li |
Автор |
T Yang |
Автор |
M Q Huang |
Автор |
P J Wu |
Автор |
G R Liu |
Автор |
Z X Zhao |
Дата выпуска |
1996-12-01 |
dc.description |
A simple `lift-off' technique was developed for fabricating sharp step edges without ion milling. A (YBCO) film was first deposited on an (STO) substrate and then patterned by using conventional photolithography. Subsequenctly an STO film was deposited on top of the patterned YBCO film. Then the YBCO film underneath was dissolved in acid, resulting in lifting off of the top STO layer in fragments, leaving half of the STO film on the substrate. A sharp step edge was obtained on the boundary of the STO film. Atomic force microscopy showed the step profile. The of the step edge junctions were 88 - 90 K, independent of film thickness. The I - V curves were RSJ like and clear Shapiro steps were observed. products from to were obtained at 77 K. Simple DC SQUIDs fabricated with these junctions exhibited a periodic response in the presence of magnetic field. |
Формат |
application.pdf |
Издатель |
Institute of Physics Publishing |
Название |
A simple lift-off process for sharp step edges and Josephson junctions |
Тип |
paper |
DOI |
10.1088/0953-2048/9/12/012 |
Electronic ISSN |
1361-6668 |
Print ISSN |
0953-2048 |
Журнал |
Superconductor Science and Technology |
Том |
9 |
Первая страница |
1087 |
Последняя страница |
1091 |
Аффилиация |
J C Nie; National Laboratory for Superconductivity, Institute of Physics, Chinese Academy of Sciences, Beijing, 100080, China |
Аффилиация |
L Chen; National Laboratory for Superconductivity, Institute of Physics, Chinese Academy of Sciences, Beijing, 100080, China |
Аффилиация |
L Li; National Laboratory for Superconductivity, Institute of Physics, Chinese Academy of Sciences, Beijing, 100080, China |
Аффилиация |
T Yang; National Laboratory for Superconductivity, Institute of Physics, Chinese Academy of Sciences, Beijing, 100080, China |
Аффилиация |
M Q Huang; National Laboratory for Superconductivity, Institute of Physics, Chinese Academy of Sciences, Beijing, 100080, China |
Аффилиация |
P J Wu; National Laboratory for Superconductivity, Institute of Physics, Chinese Academy of Sciences, Beijing, 100080, China |
Аффилиация |
G R Liu; National Laboratory for Superconductivity, Institute of Physics, Chinese Academy of Sciences, Beijing, 100080, China |
Аффилиация |
Z X Zhao; National Laboratory for Superconductivity, Institute of Physics, Chinese Academy of Sciences, Beijing, 100080, China |
Выпуск |
12 |