A magnetically coupled SQUID for the digital readout of integrated HTS circuits
Mutsuo Hidaka; Sadahiko Miura; Tetsuro Satoh; Wataru Hattori; J S Tsai; Shuichi Tahara; Mutsuo Hidaka; Fundamental Research Laboratories, NEC Corporation, 34, Miyukigaoka, Tsukuba, Ibaraki 305, Japan; Sadahiko Miura; Fundamental Research Laboratories, NEC Corporation, 34, Miyukigaoka, Tsukuba, Ibaraki 305, Japan; Tetsuro Satoh; Fundamental Research Laboratories, NEC Corporation, 34, Miyukigaoka, Tsukuba, Ibaraki 305, Japan; Wataru Hattori; Fundamental Research Laboratories, NEC Corporation, 34, Miyukigaoka, Tsukuba, Ibaraki 305, Japan; J S Tsai; Fundamental Research Laboratories, NEC Corporation, 34, Miyukigaoka, Tsukuba, Ibaraki 305, Japan; Shuichi Tahara; Fundamental Research Laboratories, NEC Corporation, 34, Miyukigaoka, Tsukuba, Ibaraki 305, Japan
Журнал:
Superconductor Science and Technology
Дата:
1996-04-01
Аннотация:
A magnetically coupled SQUID (superconducting quantum interference device) for the digital readout of integrated HTS (high-temperature superconductor) circuits has been developed and a multilayer integration process for HTS circuits was evaluated. We employed ramp edge junctions in this process; the SQUID's control line was formed using the counter layer of the junctions. Three ex situ epitaxial layers were grown. Ion beam etchings were used for the base electrode and insulation layer without substrate rotation. Clear voltage modulation for the SQUID was observed up to 65 K. The critical current of the wide control line was 1.2 mA at 65 K.
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