| Автор | D E Harrison Jr |
| Автор | Rodriguez deJesus |
| Автор | R Smith |
| Дата выпуска | 1989-10-02 |
| dc.description | Techniques of simulating liquid Cu for the purpose of generating a target for a molecular dynamics simulations of the sputtering of liquid Cu have been investigated. The targets were generated by warming a solid Cu crystal in two different ways, first by assigning thermal velocities to the Cu atoms and secondly by thermal displacements increasing the target temperature in a series of warm cycles. The targets were then allowed to relax until equilibrium occurred. Targets with and without solid reflecting boundaries were examined and the resulting simulated liquid targets were compared. The target with the best liquid properties was then used for the sputtering simulation. The targets generated by these methods showed excellent agreement with both the Maxwell-Boltzmann distribution and the radial distribution function as measured by neutron diffraction. The preliminary sputtering investigation resulted in a sputtering yield increase of about 40% compared to that calculated for a low-index crystal plane. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | A simulation of liquid Cu and a comparison of sputtering of solid and liquid Cu under 1 keV Ar<sup>+</sup> bombardment |
| Тип | paper |
| DOI | 10.1088/0953-8984/1/39/023 |
| Electronic ISSN | 1361-648X |
| Print ISSN | 0953-8984 |
| Журнал | Journal of Physics: Condensed Matter |
| Том | 1 |
| Первая страница | 7113 |
| Последняя страница | 7122 |
| Выпуск | 39 |
