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Автор Paul D Brown
Дата выпуска 2000-12-11
dc.description Site-specific focused ion beam milling procedures are used to prepare cross-sectional TEM sample foils through a range of epitaxial GaN thin films. The high threading defect densities associated with heteroepitaxial GaN/sapphire prohibit the unambiguous identification of hillock nucleation events. Inversion domains are, however, identified at the core of hillocks formed on CVD grown GaN on N-polar bulk GaN substrates. It is considered that remnant contamination from the KOH chemomechanical polishing procedure is responsible for the inversion domain nucleation.
Формат application.pdf
Издатель Institute of Physics Publishing
Название A transmission electron microscopy investigation of buried defect sources within epitaxial GaN
Тип paper
DOI 10.1088/0953-8984/12/49/319
Electronic ISSN 1361-648X
Print ISSN 0953-8984
Журнал Journal of Physics: Condensed Matter
Том 12
Первая страница 10195
Последняя страница 10203
Аффилиация Paul D Brown; School of Mechanical, Materials, Manufacturing, Engineering and Management, University of Nottingham, University Park, Nottingham NG7 2RD, UK
Выпуск 49

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