Автор |
Paul D Brown |
Дата выпуска |
2000-12-11 |
dc.description |
Site-specific focused ion beam milling procedures are used to prepare cross-sectional TEM sample foils through a range of epitaxial GaN thin films. The high threading defect densities associated with heteroepitaxial GaN/sapphire prohibit the unambiguous identification of hillock nucleation events. Inversion domains are, however, identified at the core of hillocks formed on CVD grown GaN on N-polar bulk GaN substrates. It is considered that remnant contamination from the KOH chemomechanical polishing procedure is responsible for the inversion domain nucleation. |
Формат |
application.pdf |
Издатель |
Institute of Physics Publishing |
Название |
A transmission electron microscopy investigation of buried defect sources within epitaxial GaN |
Тип |
paper |
DOI |
10.1088/0953-8984/12/49/319 |
Electronic ISSN |
1361-648X |
Print ISSN |
0953-8984 |
Журнал |
Journal of Physics: Condensed Matter |
Том |
12 |
Первая страница |
10195 |
Последняя страница |
10203 |
Аффилиация |
Paul D Brown; School of Mechanical, Materials, Manufacturing, Engineering and Management, University of Nottingham, University Park, Nottingham NG7 2RD, UK |
Выпуск |
49 |