The adsorption and thermal decomposition of PH<sub>3</sub> and NH<sub>3</sub> on GaAs(100)
N K Singh; A J Murrell; D Harrison; J S Foord; N K Singh; Phys. Chem. Lab., Oxford Univ., UK; A J Murrell; Phys. Chem. Lab., Oxford Univ., UK; D Harrison; Phys. Chem. Lab., Oxford Univ., UK; J S Foord; Phys. Chem. Lab., Oxford Univ., UK
Журнал:
Journal of Physics: Condensed Matter
Дата:
1991-11-01
Аннотация:
The adsorption and thermal decomposition of PH<sub>3</sub> and NH<sub>3</sub> on the Ga-rich GaAs(100)-(4*1) has been studied using temperature programmed desorption, isotope exchange reactions and high resolution electron energy loss spectroscopy (HREELS). At 120 K PH<sub>3</sub> adsorbs molecularly while HREELS and isotope exchange reactions with deuterium suggest that PH<sub>2</sub> is the major species present at 300 K. Molecular adsorption is also observed for NH<sub>3</sub> at 150 K when both the physisorbed and chemisorbed states are formed. HREELS and isotope exchange reactions show that dissociation of the molecular state to form NH<sub>2</sub> occurs when the adsorbed phase is heated.
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