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Автор N Artunc
Автор Z Z Ozturk
Дата выпуска 1993-02-01
dc.description The resistivity of single-layered thin copper films with thickness of 17-124 nm, is studied as a function of the temperature and grain diameter. The resistivity of both as-deposited and 500 K annealed films is found to increase with decreasing film thickness. Analysis has shown that the grain-boundary scattering is the dominant contribution and the surface scattering cannot be the cause of the excess resistivity of both as-deposited and 500 K annealed films. The average reflection coefficient R of the electrons scattered by the grain boundaries is found to be 0.38 for both as-deposited and 500 K annealed films over the whole temperature and thickness range studied.
Формат application.pdf
Издатель Institute of Physics Publishing
Название Influence of grain-boundary and surface scattering on the electrical resistivity of single-layered thin copper films
Тип paper
DOI 10.1088/0953-8984/5/5/007
Electronic ISSN 1361-648X
Print ISSN 0953-8984
Журнал Journal of Physics: Condensed Matter
Том 5
Первая страница 559
Последняя страница 566
Аффилиация N Artunc; Dept. of Phys., Fac. of Sci., Ege Univ., Izmir, Turkey
Аффилиация Z Z Ozturk; Dept. of Phys., Fac. of Sci., Ege Univ., Izmir, Turkey
Выпуск 5

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