Автор |
N Artunc |
Автор |
Z Z Ozturk |
Дата выпуска |
1993-02-01 |
dc.description |
The resistivity of single-layered thin copper films with thickness of 17-124 nm, is studied as a function of the temperature and grain diameter. The resistivity of both as-deposited and 500 K annealed films is found to increase with decreasing film thickness. Analysis has shown that the grain-boundary scattering is the dominant contribution and the surface scattering cannot be the cause of the excess resistivity of both as-deposited and 500 K annealed films. The average reflection coefficient R of the electrons scattered by the grain boundaries is found to be 0.38 for both as-deposited and 500 K annealed films over the whole temperature and thickness range studied. |
Формат |
application.pdf |
Издатель |
Institute of Physics Publishing |
Название |
Influence of grain-boundary and surface scattering on the electrical resistivity of single-layered thin copper films |
Тип |
paper |
DOI |
10.1088/0953-8984/5/5/007 |
Electronic ISSN |
1361-648X |
Print ISSN |
0953-8984 |
Журнал |
Journal of Physics: Condensed Matter |
Том |
5 |
Первая страница |
559 |
Последняя страница |
566 |
Аффилиация |
N Artunc; Dept. of Phys., Fac. of Sci., Ege Univ., Izmir, Turkey |
Аффилиация |
Z Z Ozturk; Dept. of Phys., Fac. of Sci., Ege Univ., Izmir, Turkey |
Выпуск |
5 |