| Автор | J T L Thong |
| Автор | W C Nixon |
| Дата выпуска | 1990-04-01 |
| dc.description | An electron-optical element has been developed which delays electron pulses with continuous phase-shift resolution over a 200 ps delay span. The method relies on changing the beam potential, and hence electron flight time, in an axisymmetric electrostatic lens system over a defined section of the optical path. Changes in the focal length of the electrostatic lens are compensated for by a superimposed magnetic lens field. The composite lens system is weak in comparison with the other lenses in a SEM and contributes minimally to the aberrations of the overall optical system. This element, retro-fitted to an existing electron-optical column, acts independently of the beam blanking system and is inherently 'jitter free', which is important in contributing to picosecond resolution performance in electron-beam testing instruments. Time-resolved electron pulse measurements based on the streak camera principle demonstrate the phase-shift resolution of the element using 5 ps pulses while waveforms have been measured on coplanar lines. A brief analysis of phase distortion and phase noise introduced by an electron spectrometer is presented and it is shown that these may be compensated for using this element. Computational results on the properties of the element are given, including considerations of pulse dispersion in the system due to energy spread in the beam. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | An electron-optical phase-shift element for high-speed electron beam testing |
| Тип | paper |
| DOI | 10.1088/0957-0233/1/4/004 |
| Electronic ISSN | 1361-6501 |
| Print ISSN | 0957-0233 |
| Журнал | Measurement Science and Technology |
| Том | 1 |
| Первая страница | 337 |
| Последняя страница | 344 |
| Аффилиация | J T L Thong; Dept. of Eng., Cambridge Univ., UK |
| Аффилиация | W C Nixon; Dept. of Eng., Cambridge Univ., UK |
| Выпуск | 4 |
