| Автор | D W Lane |
| Автор | G Partridge |
| Дата выпуска | 1990-09-01 |
| dc.description | The design of an ion beam chopper is discussed for the accurate determination of beam current during ion implantation into insulating materials. The effective suppression of secondary electrons is investigated using a composite chopper blade constructed from two dissimilar metals. The chopper design is presented which includes a combination of both electrostatic and magnetic suppression and results in complete suppression of the secondary electrons. A technique is described for the calibration of the chopper. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | The design and calibration of an ion beam chopper |
| Тип | paper |
| DOI | 10.1088/0957-0233/1/9/008 |
| Electronic ISSN | 1361-6501 |
| Print ISSN | 0957-0233 |
| Журнал | Measurement Science and Technology |
| Том | 1 |
| Первая страница | 878 |
| Последняя страница | 880 |
| Аффилиация | D W Lane; R. Mil. Coll. of Sci., Shrivenham, Swindon, UK |
| Аффилиация | G Partridge; R. Mil. Coll. of Sci., Shrivenham, Swindon, UK |
| Выпуск | 9 |
