| Автор | K W Lee |
| Автор | J T L Thong |
| Дата выпуска | 1999-11-01 |
| dc.description | A simple technique to characterize the response of a SEM deflection system is described. By measuring the delay in the SEM video signal as the primary beam is deflected and swept over a knife-edge, the transient deflection response can be mapped out. The transfer function of the beam deflection is then approximated by exponential functions and appropriate analogue filters are designed to pre-emphasise the deflection coil drive signal in order to increase the deflection speed. This technique is used to decrease the deflection response time from typically ~6 µs to ~0.5 µs, thereby allowing the implementation of non-raster scanning schemes that require fast point-to-point deflection. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Improving the speed of scanning electron microscope deflection systems |
| Тип | paper |
| DOI | 10.1088/0957-0233/10/11/316 |
| Electronic ISSN | 1361-6501 |
| Print ISSN | 0957-0233 |
| Журнал | Measurement Science and Technology |
| Том | 10 |
| Первая страница | 1070 |
| Последняя страница | 1074 |
| Аффилиация | K W Lee; Centre for Integrated Circuit Failure Analysis and Reliability, Faculty of Engineering, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260, Singapore |
| Аффилиация | J T L Thong; Centre for Integrated Circuit Failure Analysis and Reliability, Faculty of Engineering, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260, Singapore |
| Выпуск | 11 |
